Wafer Acceptance Test
WAT6300
High Voltage Serial Parametric Test System
The Semight WAT6300 series High Voltage Serial Parametric Test System can be optionally equipped to achieve vertical and general high voltage wafer-level parameter testing, and can quickly perform accurate high and low voltage DC measurements, capacitance measurements, and more. The vertical test system is equipped with a low voltage and low leakage matrix and a dual-output high voltage matrix, supporting one CHUCK and one planar high voltage output. Under the condition of CHUCK high voltage at 3500V, it can support up to 24 channels of low voltage output on the front side, and under the condition of CHUCK at less than 600V, it can support up to 48 channels of low voltage output on the front side. The universal test system can be optionally equipped with a medium voltage 1800V or high voltage 3500V switching matrix, expandable to a maximum of 48 or 24 channels and CHUCK output, suitable for testing both planar and vertical devices. The universal medium voltage serial WAT tester also supports 48 channels of full Kelvin output, with all instruments housed in a cabinet, using Cable OUT method in conjunction with fully automatic or semi-automatic probe stations. Both vertical and general systems are equipped with high and low voltage protection circuits to enhance system operational stability.
Features
Self-developed Hardware Resources
Self-developed SMU & HV-SMU
Strong Capabilities
Perpin SMU output capability 200V max, 1A max
Flexible configuration of Pin number
Supports 48 pin full kelvin pins
High Precision
System leakage current ＜ 500fA
SECS/GEM Compliance
Easy integration to customer EAP or factory automation
Built-in Maintenance software
CAL/DIAG/PV
48pin 230mm-diamter probe card
Protect customer investment on probe card, low migration cost to new tester
Compatible with Mainstream Probers
TEL P8XL/P12/P12XL/Precio XL, TSK UF200/UF3000/UF3000EX, etc.
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Category |
Sub-Category |
Description |
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System Cabinet |
Cabinet |
Rack, EMO, Power Supply and Distribution Unit |
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Controller |
Win10 Workstation, ptSEMIGHT software suites |
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LCR |
Optional 1fF~100nF range Frequency:1KHz~1MHz |
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DMM |
Optional 7 ½ display resolution |
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Signal Analyzer |
Optional 9K~10M frequency range |
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Vertical High Voltage Switch Matrix |
RM1012-HV (Optional): 2 low voltage channels(200V), 1 high voltage channel(3500V), 1 input port for CMU with 3000V HV-bias, 1 output port to prober chuck |
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High Voltage SMU |
Optional: 3500V, 120mA, 100uV/10fA (Semight S3030F) 1100V, 1A, 100nV/10fA (Commercial SMU) |
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Test Head |
Test Head Mainframe |
Mainframe, PXIe chassis for SMU & PGU |
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Low-leakage Switch Matrix |
RM1010-LLC[1]: Switch Matrix with 14 input channels, maximum 4 daughter cards (R1010G-LLC) each supporting 12 output channel (totally 48 outputs)
R1010G-LLC: Daughter card for Switch Matrix, 200V, 1A, <100fA @10V(low leakage channel) |
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Universal High Voltage Switch Matrix |
RM1013-HV (Optional): Universal HV Switch Matrix mainframe, 10 input ports (2 for 3500V), 3x R1013G-HV daughter cards for maximum 24 output ports
R1013G-HV (Optional): Universal HV Switch Matrix daughter card, 8 output ports, each port supports 3500V, 1A and <1pA@10V leakage |
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Source Measure Unit (SMU) |
S2012C (optional): 1x PXIe slot, 200V, 1A, 100nV/10fA
S2016C (optional): 1x PXIe slot, 200V, 1A, 100nV/1fA |
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Semiconductor Pulse Generator (SPGU) |
S3023P (optional): 2x PCIe slots, ±40V(Open), ±20V(50Ω) |
[1] 600V for 48 output channels; 3500V for 24 output channels
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Application |
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High voltage WAT test for Si/GaN/SiC, WLR |
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Test Items (typical) |
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IV/CV |
Id-Vd, Id-Vg, Vth, BV, Ig, Ioff, Gm |
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MIM_CAP, C & G |
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Ic-Vc, BETA, BV |
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Ron, R_tlm, Rsh_van |
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Spot, Sweep, Search |
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Kelvin & Non-Kelvin |
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Differential Voltage |
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Frequency |
Frequency |
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Reliability |
HCI, BTI/NBTI, TDDB |
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DC |
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Resource |
Semight S2012C, S2016C, S3030F, Commercial SMU |
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Function |
Spot, Sweep |
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Range |
S2012C: 10fA to 1A 100nV to 200V |
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S2016C: 1fA to 1A 100nV to 200V |
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S3030F: 10fA to 120mA 100uV to 3500V |
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Commercial SMU: 10fA to 1A 100nV to 1000V |
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Capacitance |
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Resource |
External LCR |
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Function |
C/G |
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Frequency |
1kHz, 10kHz, 100kHz, 1MHz |
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Range |
1fF to 100nF |
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DC Bias |
±40 V |
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HV DC Bias |
±3000 V |
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Differential Voltage |
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Resource |
External DMM |
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Range |
1µV to 100V |
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Pulse Generation |
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Resource |
Semight S3023P |
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Amplitude |
±40V (Open), ±20V(50Ω) |
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Frequency |
0.1Hz to 10MHz |
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Pulse Width |
60 ns to (Period - 60 ns) |
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Tr/Tf |
20 ns (Vamp < 5V, Open） |
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Frequency Measurement |
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Resource |
External Signal Analyzer |
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Frequency Range |
9K to 10M Hz |
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Low-leakage Switch Matrix |
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Switch Matrix |
Semight RM1010-LLC |
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Output Channels |
x12, x24, x36, x48 |
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Interface |
Maximum 8 input SMUs (2 for low leakage) |
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Maximum 14 input ports, include 2x 4-1 MUX ports for external instruments (SMU/LCR/DMM/PGU) |
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Vertical High Voltage Switch Matrix |
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Switch Matrix |
Semight RM1012-HV |
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Output |
1 output port |
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Input |
4 input ports: 2 for LV (200V), 1 for HV (3500V), 1 for CMU with 3000V HV-bias |
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Universal High Voltage Switch Matrix |
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Switch Matrix |
Semight RM1013-HV |
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Output |
x8, x16, x24, CHUCK |
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Input |
Maximum 10 input ports: 6x for SMUs, 2x for 3-1 MUX ports used by external instruments, 2x HV ports (3500V) |
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